Rivadulla Fernández, José FranciscoRivas Murias, BeatrizVila Fungueiriño, José Manuel2016-10-202016-10-202016http://hdl.handle.net/10347/14935This thesis describes the most relevant aspects in PAD method as well the process of optimization to obtain high quality epitaxial thin films of multicationic oxides. For this we have analyzed the structure and the behavior of polymers both in solution and under thermal degradation, and it has been determined the degree of retention for different metals in combination with various chelating agents. The synthesis and characterization of thin films have been applied to a set of oxides with different compositions and properties, controlling the thickness, stoichiometry, etc. The effect of growth conditions was studied by comparison with films prepared by classical physical methods. Furthermore, two different materials were combined in the same structure in the form of bilayers with a clear interface between the two individual layers. All this progress over single-crystal substrates was used to deposit functional oxides integrated on silicon at the end of this thesis.engEsta obra atópase baixo unha licenza internacional Creative Commons BY-NC-ND 4.0. Calquera forma de reprodución, distribución, comunicación pública ou transformación desta obra non incluída na licenza Creative Commons BY-NC-ND 4.0 só pode ser realizada coa autorización expresa dos titulares, salvo excepción prevista pola lei. Pode acceder Vde. ao texto completo da licenza nesta ligazón: https://creativecommons.org/licenses/by-nc-nd/4.0/deed.glhttps://creativecommons.org/licenses/by-nc-nd/4.0/deed.glThin filmsOxidesPolymer Assisted Deposition (PAD)Polyethyleneimine221190330305doctoral thesisopen access