RT Journal Article T1 Polymer assisted deposition of epitaxial oxide thin films A1 Vila Fungueiriño, José Manuel A1 Rivas Murias, Beatriz A1 Rubio-Zuazo, Juan A1 Carretero-Genevrier, Adrián A1 Lazzari, Massimo A1 Rivadulla Fernández, José Francisco AB Chemical solution methods for thin-film deposition constitute an affordable alternative to high-vacuum physical technologies, like Sputtering, Pulsed Laser Deposition (PLD) or Molecular Beam Epitaxy (MBE). Particularly, chemical methods have proven to be very suitable for producing functional films over large areas, especially in the relatively thick range, from >100 nm to microns. Also, their versatile ability to synthesize different types of materials, i.e. carbides, silicides, pnictides, oxides or chalcogenides, makes them very attractive for a wide range of applications and studies. However, problems with surface/interface roughness, control of stoichiometry in multicationic or precisely-doped materials, and a lack of accurate control of the thickness in the thin limit range (<20 nm) has reduced the competitiveness of these processes over high vacuum physical methods. This is particularly true in the case of multicationic oxide thin-films, which have experienced frantic research activity in recent years associated with phenomena of interactions across atomically sharp interfaces; the vast majority of oxide thin films used in these studies were deposited under high vacuum. Here, we review the Polymer Assisted Deposition (PAD) of epitaxial thin-films, with particular emphasis on the case of oxides. As we will show in this review, PAD is very versatile for producing different structural phases (perovskites, spinels, garnets, etc.), demonstrating its competitiveness in producing oxide thin-films with the quality required for fundamental studies and applications, as well as its complementarity to physical methods for stabilizing metastable materials and composite heterostructures. We also provide a detailed step by step description of the most relevant chemical aspects of the method, in order to make it reproducible and attractive to laboratories with little experience in complex chemistry tasks PB Royal Society of Chemistry SN 2050-7526 YR 2018 FD 2018 LK http://hdl.handle.net/10347/17025 UL http://hdl.handle.net/10347/17025 LA eng NO Vila-Fungueiriño, J., Rivas-Murias, B., Rubio-Zuazo, J., Carretero-Genevrier, A., Lazzari, M., & Rivadulla, F. (2018). Polymer assisted deposition of epitaxial oxide thin films. Journal Of Materials Chemistry C, 6(15), 3834-3844. doi: 10.1039/c8tc00626a NO We acknowledge financial support by theMinistry of Science of Spain (Projects No. MAT2016-80762-R),the Consellería de Cultura, Educación e Ordenación Universitaria(ED431F 2016/008, and Centro singular de investigación deGalicia accreditation 2016-2019, ED431G/09), the European RegionalDevelopment Fund (ERDF). ACG and JMVF acknowledgethe financial support from the French Agence Nationale pour laRecherche (ANR), project Q-NOSS ANR ANR-16-CE09-0006-01 DS Minerva RD 24 abr 2026