Scaling Challenges of Nanosheet Field-Effect Transistors Into Sub-2 nm Nodes

Abstract

The scaling of nanosheet (NS) field effect transistors (FETs) from the 12 nm gate length to the ultimate gate length of 10 nm for sub-2 nm nodes brings additional technological challenges. Here, 3D finite element Monte Carlo simulations are employed to explore how to alter the NS architecture to increase the drive current ( IDD ) because the gate scaling to 10 nm results in a decline of the current (by 10.7 %). IDD of the 10 nm gate length NS FET will increase by 11% if the maximum n-type source/drain doping reaches 1×1020cm−3 , or increase by 3.8 % if the high- κ dielectric layer equivalent oxide thickness (EOT) is less than 1.0 nm. The reduction in the channel width below 40 nm or the reduction in the channel thickness below 5 nm will substantially decrease IDD. The sub-threshold figures of merit like the sub-threshold slope (SS) will decrease from 75 to 73 mV/dec, while the drain-induced barrier lowering (DIBL) will increase from 32 to 77 mV/V. Finally, the effect of strain to increase the drive current is strongly limited by quantum confinement. IDD will increase by 3% and by 14% in the 10 nm gate NS FET with the ⟨110⟩ and ⟨100⟩ channel orientations, respectively, when a strain of 0.5 % is applied to the channel, with a negligible increase for larger strain values ( 0.7 % and 1.0 %).